翻译-以微型机器人为基础的自动化

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本科生毕业设计（论文）

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中文题目：以微型机器人为基础的自动化

显微操作装置为微系统装配

英文题目： A microbot-based automated micromanipulation

station for assembly of microsystems

A microrobot-based automated micromanipulation station for

assembly of microsystems

Sergej Fatikow Mirko Benz

Abstract：

The development of new types of miniaturized and microrobots with human-

like capabilities play an important role in different application tasks. One of the main

problem of present-day research is, for example, to assemble a whole microsystem

from different microcomponents.This paper presents an automated

micromanipulation desktop station including a piezoelectrically driven microrobot

placed on the highly-precise x–y stage of a light microscope, a CCD-camera as a

local sensor subsystem, a laser sensor unit as a global sensor subsystem, and a

Pentium PC equipped additionally with an optical grabber. The microrobot has three

piezoelectrically driven legs and two autonomous manipulators as endeffectors; it

can perform highly-precise manipulations （with an accuracy of up to 10 nm） and

a nondestructive transport （at a speed of several mm/s ） of very small objects

under a microscope. To perform manipulations automatically, a control system,

including a task planning level and a real-time execution level, is being developed.

Keywords ： Microrobots; Microassembly; Automated desktop station; Assembly

planning; Piezoactuators

1.Introduction：

There is a growing need for miniaturized and microrobots worldwide. Due to

the enormous breakthroughs in conventional robotics and in the microsystem

technology (MST),everyone is convinced that the development of remote-controlled

or autonomous microrobots will lead to improvements in many areas. Above all,

positive results are expected in medicine (microsurgery),manufacturing

(microassembly, inspection and maintenance), biology (manipulation of cells) and

testing/measuring technique (VLSI) . Medicine is one of the application fields which

would profit by the microrobotics the most. The attention lies on artificial organs

(prosthetics) , laparoscopy, implantable drug delivery systems (diagnosis and therapy

systems) , telemicrosurgery, etc. The minimal-invasive surgery developed into an

important field of medicine during the last years.Smaller and more flexible active

endoscopes are needed in order to replace human hands, respond to outer incidents,

penetrate into a body or a vessel through natural bodily orifice or a small incision by

remote control, where they perform complex in-situ measurements and

manipulations. In order to meet these requirements, microprocessors, several sensors

and actuators, a light source and possibly an image processing unit should be

integrated into an intelligent

endoscope. Biotechnology requires special microstructured active tools which are

able to perform micromanipulations like the sorting or reunion of cells or the

injection of a foreign body into a cell under a microscope. In the gene research and

the environment technique （cells as indicators for harmful substances ）, precise

and gentle manipulation of single cells are also required. Industry and especially

manufacturing and measuring techniques need highly sensitive testing methods in the

μm-range. An important task represents, for example, the inspection of wafers, where

several check points have to be contacted by a temperature or voltage probe. The

same is valid for inspection robots which are used in inaccessible or dangerous

terrain in order to detect leaks or flaws and make repairs （e.g., in pipelines）。The

adoption of MST-related developments by the industry has already demonstrated

which kind of problems occur with the mass production of microsystems. These

systems usually consist of microcomponents of different materials which are

produced with various microtechniques; this leads to one or several very precise

assembly step （s）of the

individual components. The assembly of microsystems, i.e., the non-destructible

transport, precise manipulation or exact positioning of microcomponents is becoming

one of the most important applications in microrobotics.

2. Manipulation of microobjects：

The availability of highly precise assembly processes will make it easier to

economically realize operable microsystems. In order to efficiently produce

microsystems and components in lot sizes or by mass-production techniques, it is

absolutely necessary to introduce flexible, automated, precise and fast

microassembly stations. Different concepts are being followed to do

micromanipulation for particular

classes of application.

Purely manual micromanipulation is the most often used method today. In

medicine and biological research, it is used exclusively. Even in industry,

microassembly tasks are very often carried out by specially trained technicians, who,

for example, preposition assembly parts using screws and springs, then position the

parts with tiny hammers and tweezers, and finally fasten them in the desired position.

However, with increasing component miniaturization, the tolerances become smaller

and smaller, and the capabilities of the human hand are no longer adequate.

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本科生毕业设计（论文）翻译资料中文题目：以微型机器人为基础的自动化显微操作装置为微系统装配英文题目：Amicrobot-basedautomatedmicromanipulationstationforassemblyofmicrosystemsAmicrorobot-basedautomatedmicromanipulationstationforassemblyofmicrosystemsSergejFatikowMirkoBenzAbstract：Thedevelopmentofnewtypesofminiaturizedandmicrorobotswithhuman-likecapab...

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